Research Article of American Journal of Engineering Research and Reviews
Thin Film Diamond For Optical Applications
Mohammad Abdul Razak1 and Sheikh Irfan Samad1
1College of electrical engineering, Universiti Malaya, Malaysia
Diamond is a unique material with robust mechanical properties, the electrical and the optical properties of the thin film diamond can be altered as they are deposited using microwave plasma enhanced chemical vapor deposition (MPCVD) method. The thin film diamond can be used both as optical window for certain wavelengths of light and as a reflector, based on the thickness and the deposition parameters of the thin film diamond. In this paper, we are illustrating a 1 µm thin film diamond that we were able to deposit, pattern and etch selectively using standard microfabrication techniques. This patterning of diamond film allows us to create 3D structures using single crystal diamond.
Keywords: crystalline diamond, amorphous diamond, retroreflector, optical, MPCVD
How to cite this article:
Mohammad Abdul Razak and Sheikh Irfan Samad.Thin Film Diamond For Optical Applications. American Journal of Engineering Research and Reviews, 2018, 1:1
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